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Viser: Microsystem Design
Microsystem Design
Stephen D. Senturia
(2004)
Sprog: Engelsk
Detaljer om varen
- Hardback: 720 sider
- Udgiver: Springer (December 2004)
- ISBN: 9780792372462
Part I: Getting Started.
1. Introduction.
2. An Approach to MEMS Design.
3. Microfabrication.
4. Process Integration.
Part II: Modeling Strategies.
5. Lumped Modeling.
6. Energy-Conserving Transducers.
7. Dynamics.
Part III: Domain-Specific Details.
8. Elasticity.
9. Structures.
10. Energy Methods.
11. Dissipation and the Thermal Energy Domain.
12. Lumped Modeling of Dissipative Processes.
13. Fluids.
Part IV: Circuit and System Issues.
14. Electronics.
15. Feedback Systems.
16. Noise.
Part V: Case Studies.
17. Packaging.
18. A Piezoresistive Pressure Sensor.
19. A Capacitive Accelerometer.
20. Electrostatic Projection Displays.
21. A Piezoelectric Rate Gyroscope.
22. DNA Amplification.
23. A Microbridge Gas Sensor. Appendices: A. Glossary of Notation. B. Electromagnetic Fields. C. Elastic Constants in Cubic Material. References. Index.